Synthesis and characterization of plasma-polymerized hexamethyldisiloxane films

Shigeru Kurosawa, Bong-Geun Choi, Jong‐Won Park, Hidenobu Aizawa, Kwang-Bo Shim, Kazuhiro Yamamoto

Thin Solid Films · 2005 · 48 citations · 13 references

Concepts

References

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