Improvement of hardness in plasma polymerized hexamethyldisiloxane coatings by silica-like surface modification

An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments

W. C. Oliver, George M. Pharr · Journal of materials research/Pratt's guide to venture capital sources · 1992 · 26.6K citations

Natural Sciences, Materials Engineering, Materials Science +16

Synthesis of plasma-polymerized tetraethoxysilane and hexamethyldisiloxane films prepared by atmospheric pressure glow discharge

Yoshihide Sawada, Shuichi Ogawa, Masuhiro Kogoma · Journal of Physics D Applied Physics · 1995 · 219 citations

Natural Sciences, Materials Engineering, Materials Science +15

Mechanisms of plasma polymerization of various silico-organic monomers

Christiane Rau, W. Kulisch · Thin Solid Films · 1994 · 183 citations

Natural Sciences, Chemical Engineering, Materials Science +14

Evidence for disorder-induced vibrational mode coupling in thin amorphous SiO2 films

P. Lange · Journal of Applied Physics · 1989 · 179 citations

Natural Sciences, Materials Science, Physics +17

Hardness measurements of Ar⁺-beam treated polyimide by depth-sensing ultra low load indentation

E.H. Lee, Yousub Lee, W. C. Oliver et al. · Journal of materials research/Pratt's guide to venture capital sources · 1993 · 89 citations

Natural Sciences, Materials Engineering, Materials Science +10