Characterization of a-SiCx:H thin films as an encapsulation material for integrated silicon based neural interface devices - Concepedia

Concepedia

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Characterization of a-SiCx:H thin films as an encapsulation material for integrated silicon based neural interface devices

DOI Full Paper Access

105

Citations

22

References

2007

Year

Jui-Mei Hsu, Prashant Tathireddy, Loren Rieth, A. Richard Normann, Florian Solzbacher

Thin Solid Films

Materials ScienceEngineeringEncapsulation MaterialApplied PhysicsIntegrated SiliconSemiconductor Device FabricationThin FilmsSilicon On InsulatorH Thin FilmsThin Film ProcessingSemiconductor Device

References

	Year	Citations

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