Monolithic integrated zinc-oxide on silicon pyroelectric anemometer

Abstract

Thin films of pyroelectric ZnO have been combined wlth NMOS planar tech nology to produce a fully integrated anemometer. The anemometer is based on the differential cooling rate of two heat sensors placed up- and downstream from a heat source. The heat sensors for the anemometer consist of 2 µm-thick sputtered ZnO pyroelectric capacitors encapsulated in silicon dioxide. Sense electrodes on the capacitors are connected directly to differentially coupled depletion-mode MOSFET pairs.