Deposition of TiCN and ZrCN layers on light metals by PACVD method using radio frequency and pulsed-DC plasma

Thin zirconium nitride films prepared by plasma-enhanced CVD

H Wendel, Harald Suhr · Applied Physics A · 1992 · 39 citations

Natural Sciences, Materials Engineering, Materials Science +14

Zirconium carbonitride films produced by plasma-assisted metal organic chemical vapour deposition

H. Berndt, Aibin Zeng, H.‐R. Stock et al. · Surface and Coatings Technology · 1995 · 33 citations

Natural Sciences, Materials Engineering, Materials Science +12

Plasma-assisted chemical vapour deposition with titanium amides as precursors

H.‐R. Stock, H. Berndt, Peter Mayr · Surface and Coatings Technology · 1991 · 25 citations

Natural Sciences, Materials Engineering, Materials Science +14

Studies on the synthesis of hard coatings by plasma-assisted CVD using metallo-organic compounds

K.‐T. Rie, A. Gebauer, J. Wöhle · Surface and Coatings Technology · 1995 · 25 citations

Natural Sciences, Materials Engineering, Materials Science +16

Applications and trends in plasma-enhanced organometallic chemical vapour deposition

Harald Suhr · Surface and Coatings Technology · 1991 · 19 citations

Natural Sciences, Chemistry, Materials Science +10