Surface and Coatings Technology · 1995 · 25 citations · 6 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsCoating ProcessesCoating TechnologyCoatingsPlasma-surface InteractionsSurface ModificationThin-film DepositionCvd CoatingsHard CoatingsHard MaterialsPlasma TreatmentPlasma-assisted CoatingPlasma-enhanced DepositionPlasma-enhanced Oxidation
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