Oxygen plasma etching of carbon nano-structures containing nitrogen - Concepedia

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Oxygen plasma etching of carbon nano-structures containing nitrogen

12

Citations

23

References

2006

Year

José Javier Sáez Acuña, Carlos A. Figueroa, M.E.H. Maia da Costa, P. Paredez, C. T. M. Ribeiro, F. Alvarez

Journal of Non-Crystalline Solids

Materials ScienceEngineeringCarbon-based MaterialNanomaterialsOxygen Plasma EtchingApplied PhysicsPlasma EtchingPlasma Processing

References

	Year	Citations

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