Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 13 citations · 0 references
EngineeringManufacturing EngineeringMaterials EngineeringManufacturing SystemsMaterials ProcessingMicrofabricationLaser Material ProcessingLaser OpticsLaser Surface ProcessingMicrofabrication ProcessesRemoval TechniquesSemiconductor LasersLaser Beam MachiningLaser MicromachiningLasersNd:yag Laser TreatmentPrecision Microfabrication
Laser beam removal with Nd:YAG-lasers is a manufacturing method to produce micro-structures with the precision of a few micrometers. Because many materials can be structured with laser radiation, especially hard metals and ceramics, it is a very flexible technology for the production of tools for micro-embossing and micro-stamping. The combination of the laser and stamping technology offers the possibility to produce high quantities of micro-parts at moderate costs. A system for laser beam removal, existing of a handling with a CAD/CAM coupling and a diode pumped solid state laser was developed and in several investigations the quality of these micro-tools was tested.