Photonic Crystal Slab Waveguides Fabricated by the Combination of Holography and Photolithography

Abstract

We have fabricated air-bridge type two-dimensional photonic crystal waveguides (2D-PCWs) using two high-throughput processes only: holography and photolithography. Despite the existence of misalignments of a defect line with respect to the air-hole arrays, waveguiding in both straight and 90°-bent PCWs was clearly observed at the wavelength of 1.55 µm. We also estimated the upper bound in propagation loss of our straight PCWs, which was measured to be about 40 cm -1 .