Superconducting Y-Ba-Cu-O Oxide Films by OMCVD

Abstract

Formation of Y-Ba-Cu-O films have been attempted by the organometallic chemical vapor deposition (OMCVD) method using Y(thd) 3 , Ba(thd) 2 , and Cu(thd) 2 (thd=2,2,6,6,-tetramethyl-3,5-heptanedione), which are organic metal chelates, as gas sources. The results of electron probe microanalysis (EPMA) show that the film formed has a composition similar to that of YBa 2 Cu 3 O x ceramics. The film has a high resistivity in the as-deposited state. If the film is conditioned at 950°C for 30 minutes, the resistivity reduces extremely, providing a superconductivity. T c onset is 76 K and T c final is 60 K.