Evaluation of precursors for chemical vapor deposition of ruthenium

Chemical Vapor Deposition of Ruthenium and Ruthenium Dioxide Films

M. L. Green, M. E. Gross, Letizia Papa et al. · Journal of The Electrochemical Society · 1985 · 233 citations

Materials Science, Material Analysis, Engineering +12

Chemical Vapor Deposition at Low Temperatures

J.C. Viguie · Journal of The Electrochemical Society · 1975 · 228 citations

Chemical Engineering, Engineering, Surface Science +6

Structures and Bond Energies of the Transition-Metal Carbonyls M(CO)5 (M = Fe, Ru, Os) and M(CO)4 (M = Ni, Pd, Pt)

Andreas W. Ehlers, Gernot Frenking · Organometallics · 1995 · 114 citations

Materials Science, Inorganic Chemistry, Chemical Engineering +12

Measurement of active carbon on ruthenium (110): Relevance to catalytic methanation

D. Wayne Goodman, J. M. White · Surface Science · 1979 · 106 citations

Chemical Engineering, Carbonization, Engineering +8

Reactions of cyclopentadiene with carbonyl-ruthenium and -osmium complexes

Adrian Humphries, Selby A. R. Knox · Journal of the Chemical Society Dalton Transactions · 1975 · 86 citations

Inorganic Chemistry, Chemical Engineering, Direct Precursor +9