Publication | Closed Access
New technique for nondestructive examination of latent track etching
15
Citations
4
References
1997
Year
Electrical EngineeringNew TechniqueEngineeringElectron-beam LithographyNondestructive TestingMicroscopyMicrofabricationPreliminary Experimental ResultsMechanical EngineeringApplied PhysicsAbstract New TechniqueFabrication TechniquePlasma EtchingInstrumentationMicroelectronicsLatent Track
Abstract New technique for examination of latent track etching based on the transmission of charged particles is suggested and some of preliminary experimental results are presented proving the feasibility of the method.
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