Optics Letters · 1987 · 22 citations · 1 references
EngineeringMechanical EngineeringOpticsSensorsVibrationFiber OpticsMicromachiningOptical ResonatorsOptical SensorsVibration MeasurementVibration MonitoringFiber-optic SensingMechanical Measurement SystemsMicromachined SensorsMicromechanical OscillatorsMicroresonatorsOptical Fiber SensorsOptical Mechanical SensorsSignal-to-noise Ratio
A new fiber-optic system with which vibrations in a micromachined mechanical structure can be optically maintained and optically monitored is described. This system has achieved a signal-to-noise ratio of better than 19 dB with incoherent detection and an optical input of only 13 microW energizing the vibrations. Initial results suggest that this system will be of considerable value in advancing the study and development of optical resonator sensor systems.
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Silicon as a mechanical material
K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations