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Single- and multi-scan femtosecond laser writing for selective chemical etching of cross section patternable glass micro-channels

Materials SciencePhotonicsAdvanced Laser ProcessingEngineeringMicrofabricationLaser Micro-processingApplied PhysicsSelective Chemical EtchingMulti-scan Femtosecond LaserLaser Processing TechnologyLaser-assisted DepositionMicro-optical ComponentPlasma Etching