Publication | Open Access

Electrical, optical and structural investigation of plasma-enhanced chemical-vapor-deposited amorphous silicon oxynitride films for solar cell applications

Materials ScienceSolar Cell ApplicationsElectrical EngineeringOptical MaterialsEngineeringApplied PhysicsStructural InvestigationAmorphous SolidChemical Vapor DepositionPlasma ProcessingPhotovoltaicsThin Film Processing