Low-Temperature Growth of ZnO Films by Spray Pyrolysis

Abstract

Nondoped ZnO film on a polyethylene terephthalate film was successfully grown by conventional spray pyrolysis at 100 °C using a diethylzinc-based solution under air atmosphere. The samples had an average optical transmittance of more than 80%, a flat surface, and an a -axis orientation from the optical transmittance, scanning electron microscopy, and X-ray diffraction measurements, respectively. It was assumed that the growth at low temperature was attributed to atmospheric oxygen and/or steam.