Physicochemical properties of SiC-based ceramics deposited by low pressure chemical vapor deposition from CH3SiCl3H2 - Concepedia

Concepedia

Publication | Closed Access

Physicochemical properties of SiC-based ceramics deposited by low pressure chemical vapor deposition from CH3SiCl3H2

56

Citations

16

References

1995

Year

F. Loumagne, F. Langlais, R. Naslain, D. Dorignac, J. Sévely

Thin Solid Films

Materials ScienceChemical EngineeringCrystalline CeramicsEngineeringCeramicsSic-based CeramicsCeramic SynthesisStructural CeramicCarbidePhysicochemical Properties

References

	Year	Citations

Page 1