Micro-Raman study of diamondlike atomic-scale composite films modified by continuous wave laser annealing

Abstract

We have modified the properties of diamondlike atomic-scale composite (DLASC) material of various thicknesses (5–70 μm) by means of cw Ar-ion laser annealing using a focused beam (∼2 μm spot size). These DLASC films [amorphous “diamondlike/quartzlike” a-(C:H/Si:O)] constitute a novel class of diamond-related materials. The laser annealing effects were investigated by micro-Raman scattering. The structure of these films can be altered locally from amorphous to nanocrystalline depending not only on the parameters of the annealing process (annealing time, laser intensity) but also the mechanical properties (hardness, stress) of the films. For comparison purposes we also measured the effects of thermal annealing.