Concepedia

The influence of the electron energy distribution on the low pressure chlorine discharge

Aron Th. Hjartarson, E G Thorsteinsson

Vacuum · 2011 · 17 citations · 38 references

DOI

Concepts

References

38

Physics of Thin Films

G. Hass, D. Gerstenberg · Journal of The Electrochemical Society · 1964 · 1.8K citations

, , +12

The Mechanism of Electrical Discharges in Gases of Low Pressure

M.J. Druyvesteyn, F.M. Penning · Reviews of Modern Physics · 1940 · 728 citations

, , +9

Global model of Ar, O2, Cl2, and Ar/O2 high-density plasma discharges

Chae-Jin Lee, M. A. Lieberman · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 550 citations

, , +17

The design of plasma etchants

Daniel Flamm, Vincent M. Donnelly · Plasma Chemistry and Plasma Processing · 1981 · 310 citations

, , +12

On the effect of the electron energy distribution on the plasma parameters of an argon discharge: a global (volume-averaged) model study

Plasma Sources Science and Technology · 2001 · 202 citations

, , +16