Concepedia
Applied Surface Science · 1997 · 49 citations · 42 references
Materials ScienceEngineeringPhysicsAtomic Layer EpitaxyApplied PhysicsNbn FilmsIntermediate Zinc PulsesMolecular Beam EpitaxyPulsed Laser DepositionEpitaxial GrowthThin Film Processing
42
Structure and properties of TiN coatings
J.‐E. Sundgren · Thin Solid Films · 1985 · 897 citations
Materials Science, Materials Engineering, Engineering +5
Chemical vapor deposition of titanium nitride at low temperatures
Sarah Kurtz, Roy G. Gordon · Thin Solid Films · 1986 · 221 citations
Materials Science, Engineering, Powder Metallurgy +4
Chemical vapor deposition of titanium, zirconium, and hafnium nitride thin films
Renaud M. Fix, Roy G. Gordon, David M. Hoffman · Chemistry of Materials · 1991 · 214 citations
Materials Science, Inorganic Chemistry, Thin Filmsrenaud Fix +15
Growth and properties of single crystal TiN films deposited by reactive magnetron sputtering
B.-O. Johansson, J.‐E. Sundgren, J. E. Greene et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1985 · 206 citations
Magnetic Properties, Engineering, Crystal Growth Technology +17
Synthesis of thin films by atmospheric pressure chemical vapor deposition using amido and imido titanium(IV) compounds as precursors
Renaud M. Fix, Roy G. Gordon, David M. Hoffman · Chemistry of Materials · 1990 · 176 citations
Engineering, Chemical Analysis, Altmetric Attention Score +16