Viscous drag measurements utilizing microfabricated cantilevers

Abstract

The influence of viscous drag forces on cantilevers is investigated using standard atomic force microscope (AFM) cantilevers. Viscosity effects on several geometrically different cantilevers manifest themselves as variations in resonance frequencies, quality factors, and cantilever response amplitudes. With this novel measurement, a single cantilever can be used to measure viscosities ranging from η=10−2 to 102 g/cm s.