Concepedia

Sputtering of indium-tin oxide

R.P. Howson, I. Safi, GW Hall, N. Danson

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1997 · 10 citations · 4 references

DOI

Concepts

References

4

The formation and control of direct current magnetron discharges for the high-rate reactive processing of thin films

R.P. Howson, A.G. Spencer, K. Oka et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 80 citations

, , +17

Pressure stability in reactive magnetron sputtering

A.G. Spencer, R.P. Howson, R Lewin · Thin Solid Films · 1988 · 60 citations

, , +9

The reactive sputtering of oxides and nitrides

R.P. Howson · Pure and Applied Chemistry · 1994 · 20 citations · Full text

, , +7

The structure of rapidly thermally annealed nitrogen-implanted silicon

Z. Liliental, R. W. Carpenter, J. C. Kelly · Thin Solid Films · 1986 · 11 citations

, , +11