Design and fabrication of 10×10 micro-spatial light modulator array for phase and amplitude modulation

Electrostatic micro torsion mirrors for an optical switch matrix

Hiroshi Toshiyoshi, Hiroyuki Fujita · Journal of Microelectromechanical Systems · 1996 · 361 citations

Engineering, Electrical Engineering, Materials Science +17

Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning

Meng-Hsiung Kiang, Olav Solgaard, K.Y. Lau et al. · Journal of Microelectromechanical Systems · 1998 · 144 citations

Engineering, Manufacturing Engineering, Mechatronics Engineering +17

Mirrors on a chip

Jack M. Younse · IEEE Spectrum · 1993 · 121 citations

Engineering, Physics, Microelectromechanical Systems +12

Continuous-membrane surface-micromachined silicon deformable mirror

Thomas G. Bifano · Optical Engineering · 1997 · 116 citations

Engineering, Manufacturing Engineering, Microfabrication +14

The membrane mirror as an adaptive optical element*

R. P. Grosso, Martin Yellin · Journal of the Optical Society of America · 1977 · 103 citations

Engineering, Materials Engineering, Materials Science +14