Fine patterning of ceramic thick layer on aerosol deposition by lift-off process using photoresist

Aerosol Deposition of Ceramic Thick Films at Room Temperature: Densification Mechanism of Ceramic Layers

Jun Akedo · Journal of the American Ceramic Society · 2006 · 545 citations

Natural Sciences, Materials Engineering, Materials Science +17

PLZT thin-film waveguides

Takao Kawaguchi, Hideaki Adachi, Kentaro Setsune et al. · Applied Optics · 1984 · 134 citations

Engineering, Electrical Engineering, Materials Science +17

Powder Preparation in Aerosol Deposition Method for Lead Zirconate Titanate Thick Films

Jun Akedo, Maxim Lebedev · Japanese Journal of Applied Physics · 2002 · 94 citations

Natural Sciences, Materials Engineering, Materials Science +17

High-Speed Optical Microscanner Driven with Resonation of Lam Waves Using Pb(Zr,Ti)O₃ Thick Films Formed by Aerosol Deposition

Jun Akedo, Maxim Lebedev, Harumichi Sato et al. · Japanese Journal of Applied Physics · 2005 · 60 citations

Engineering, Materials Engineering, Materials Science +13

Reactive Ion Etching of Lead Zirconate Titanate (PZT) Thin Film Capacitors

Dilip P. Vijay, Seshu B. Desu, Wei Pan · Journal of The Electrochemical Society · 1993 · 59 citations

Natural Sciences, Materials Engineering, Materials Science +17