Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2000 · 15 citations · 3 references
EngineeringElectrical EngineeringPhysicsMicrowave EngineeringNuclear InstrumentationPlasma PhysicsHighly Charged IonsIonization ChambersIonization ProcessesMems TestingMicrowave MeasurementsPlasma SourcesIon Beam DiagnosticsIon Source PhysicsMicrowave Plasma SourcesMicrowave PlasmasPositive Ion Sources
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A compact high-current microwave-driven ion source
J. S. C. Wills, R. Lewis, J. Diserens et al. · Review of Scientific Instruments · 1998 · 26 citations