Concepedia

Publication | Closed Access

T-shape filtered arc deposition system with built-in electrostatic macro-particle trap for DLC film preparation

DOI

14

Citations

13

References

2009

Year

Masao Kamiya, Taichiro Yanagita, Hideto Tanoue, Shinichiro Oke, Yoshiyuki Suda, Hirofumi Takikawa, Makoto Taki, Yushi Hasegawa, Takeshi Ishikawa, Haruyuki Yasui
Thin Solid Films

References

YearCitations

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