Formation of silver nanoparticles in silicon by metal vapor vacuum arc ion implantation

Hye-Won Seo, Q.Y. Chen, Irene Rusakova, Z.H. Zhang, Dharshana Wijesundera, S. W. Yeh, X.M. Wang, Li Tu, N.J. Ho, Ying Wu,

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2012 · 20 citations · 11 references

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