Publication | Closed Access
Formation of silver nanoparticles in silicon by metal vapor vacuum arc ion implantation
20
Citations
11
References
2012
Year
Materials ScienceIon ImplantationEngineeringMetal NanoparticlesNanomaterialsNanotechnologySurface ScienceApplied PhysicsSilver NanoparticlesNanofabricationVacuum DeviceSilicon On Insulator
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