Sensors and Actuators · 1983 · 32 citations · 5 references
EngineeringElectrical EngineeringMechanical EngineeringInstrumentationMicroelectromechanical SystemsSensorsCapacitive SensingMicroelectromechanical SensorsPressure MeasurementPressure SensorsTransducer PrinciplesTransducer TechnologyCapacitive Pressure SensingCapacitive Pressure SensorsPressure Transducer TechnologyPressure TransducersPressure Transduction
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Miniature capacitive pressure transducers
C.D. Fung, Wen H. Ko · Sensors and Actuators · 1981 · 17 citations