Silicon deposition from silane or disilane in a fluidized bed—Part I: Experimental study

A Mathematical Model of the Fluid Mechanics and Gas‐Phase Chemistry in a Rotating Disk Chemical Vapor Deposition Reactor

Michael E. Coltrin, Robert J. Kee, Greg H. Evans · Journal of The Electrochemical Society · 1989 · 236 citations

Natural Sciences, Chemical Engineering, Chemistry +17

A Mathematical Model of the Hydrodynamics and Gas‐Phase Reactions in Silicon LPCVD in a Single‐Wafer Reactor

Chris R. Kleijn · Journal of The Electrochemical Society · 1991 · 97 citations

Engineering, Chemical Engineering, Materials Engineering +17

Gas-phase kinetics in the atmospheric pressure chemical vapor deposition of silicon from silane and disilane

Carmen J. Giunta, Richard J. McCurdy, J. Chapple-Sokol et al. · Journal of Applied Physics · 1990 · 72 citations

Natural Sciences, Chemistry, Materials Science +17

Fines in Fluidized Bed Silane Pyrolysis

G. C. Hsu, R. Hogle, N. Rohatgi et al. · Journal of The Electrochemical Society · 1984 · 46 citations

Engineering, Chemical Engineering, Materials Engineering +14

A Numerical Study on Gaseous Reactions in Silane Pyrolysis

Akimasa Yuuki, Yasuji Matsui, Kunihide Tachibana · Japanese Journal of Applied Physics · 1987 · 37 citations

Natural Sciences, Chemical Engineering, Chemistry +17