Thin Solid Films · 2009 · 15 citations · 12 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsChemical Vapor DepositionSemiconductor NanomaterialsSemiconductor Thin FilmsSilicon MaterialsThin-film MaterialsWide Band Gap SemiconductorsNanocrystalline Thin FilmsNitrides Thin FilmsSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Carbide Ceramics
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Compensation in epitaxial cubic SiC films
B. Segall, Samuel A. Alterovitz, E. J. Haugland et al. · Applied Physics Letters · 1986 · 68 citations