Publication | Closed Access
Porous Structure Formation on Silicon Surface Treated by Plasma Focus Device
19
Citations
36
References
2013
Year
Materials SciencePlasma Focus DeviceEngineeringMicrofabricationSilicon Surface TreatedSurface ScienceApplied PhysicsPorous Structure FormationGas Discharge PlasmaPlasma ApplicationPlasma EtchingPlasma Processing
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