Chemical composition and bond structure of aerosol particles of amorphous hydrogenated silicon forming from thermal decomposition of silane - Concepedia

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Chemical composition and bond structure of aerosol particles of amorphous hydrogenated silicon forming from thermal decomposition of silane

30

Citations

44

References

1997

Year

A. A. Onischuk, V.P. Strunin, Rimma I. Samoilova, M. A. Ushakova

Journal of Aerosol Science

Materials ScienceChemical EngineeringHigh Temperature AerosolEngineeringChemical CompositionNanomanufacturingChemistryHydrogenAerosol ParticlesBond StructureSilicon On Insulator

References

	Year	Citations

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