Concepedia

Publication | Closed Access

Methods of simulating thin film deposition using spray pyrolysis techniques

DOI

55

Citations

30

References

2013

Year

Lado Filipovic, S. Selberherr, Giorgio C. Mutinati, E. Brunet, Stephan Steinhauer, Anton Köck, J. Teva, Jochen Kraft, Jörg Siegert, Franz Schrank
Microelectronic Engineering

References

YearCitations

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