Publication | Closed Access

Progress in the developments of (Ba,Sr)TiO3 (BST) thin films for Gigabit era DRAMs

Materials EngineeringMaterials ScienceElectrical EngineeringEngineeringOxide ElectronicsApplied PhysicsGigabit Era DramsSemiconductor MaterialThin Film Process TechnologyThin FilmsMicroelectronicsThin Film Processing