Ion beam enhanced etching of LiNbO3

An overview of ion-implanted optical waveguide profiles

P. D. Townsend · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1990 · 128 citations

Photonics, Electrical Engineering, Optical Materials +7

Nanostructuring lithium niobate substrates by focused ion beam milling

F. Lacour, Nadège Courjal, M.P. Bernal et al. · Optical Materials · 2004 · 126 citations · Full text

Materials Science, Ion Implantation, Engineering +6

Amorphization and recrystallization of the ABO3 oxides

A. Meldrum, L. A. Boatner, William J. Weber et al. · Journal of Nuclear Materials · 2002 · 121 citations

Materials Science, Materials Engineering, Abo3 Oxides +3

Damage effects produced in the near-surface region of x-cut LiNbO3 by low dose, high energy implantation of nitrogen, oxygen, and fluorine ions

G. G. Bentini, M. Bianconi, L. Correrá et al. · Journal of Applied Physics · 2004 · 94 citations

Materials Science, Defect Tolerance, Damage Pileup +13

Microstructuring of lithium niobate using differential etch-rate between inverted and non-inverted ferroelectric domains

I.E. Barry, G.W. Ross, Peter G. R. Smith et al. · Materials Letters · 1998 · 92 citations

Materials Engineering, Materials Science, Lithium Niobate +9