Concepedia

Effects of gas composition and r.f. power on properties of a–C:H/SiC:H composite films grown by plasma-enhanced chemical vapor deposition

Jeong W. Yi, Young H. Lee, Bakhtier Farouk

Thin Solid Films · 1998 · 27 citations · 21 references

DOI

Concepts

References

21

Electronic and atomic structure of amorphous carbon

J. David Robertson, Eoin P. O’Reilly · Physical review. B, Condensed matter · 1987 · 1.4K citations

, , +17

Characterization of diamondlike carbon films and their application as overcoats on thin-film media for magnetic recording

Hsiao‐chu Tsai, David B. Bogy · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 851 citations

, , +14

A simple model for the formation of compressive stress in thin films by ion bombardment

C. A. Davis · Thin Solid Films · 1993 · 808 citations

, , +15

rf-plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applications

A. Bubenzer, B. Dischler, G. B. Brandt et al. · Journal of Applied Physics · 1983 · 500 citations

, , +17

Amorphous silicon solar cells

David Carlson · IEEE Transactions on Electron Devices · 1977 · 266 citations

, , +12