A CMOS-compatible, integrated approach to hyper- and multispectral imaging

Abstract

Imec has developed a unique hyperspectral sensor concept in which the spectral unit is monolithically integrated on top of a standard CMOS sensor at wafer level, hence enabling the design of compact, low cost and high speed spectral cameras with a high design flexibility. This paper presents the various demonstrated prototype sensors, with different filter arrangements and performance, linked to different usage modes and application domains. It also reviews the key aspects and challenges of imec's hyperspectral technology.