Measurement of surface profiles by the focusing method

Optical profilometer: a new method for high sensitivity and wide dynamic range

Yeshaiahu Fainman, Joseph Shamir · Applied Optics · 1982 · 76 citations

Engineering, Electrical Engineering, Metrology +15

Roughness measurement of ground, turned and shot-peened surfaces by the light scattering method

R. Brodmann, G. Thurn · Wear · 1986 · 42 citations

Engineering, Materials Engineering, Optics +12

Real-time digital heterodyne interferometry: a system

N. A. Massie · Applied Optics · 1980 · 41 citations

Engineering, Physics, Optics +16