Sputtering: survey of observations and derived principles

R. A. Baragiola

Philosophical Transactions of the Royal Society A Mathematical Physical and Engineering Sciences · 2003 · 63 citations · 83 references

Concepts

Abstract

We review the most salient observations and physical principles of knock-on and electronic sputtering and the role of sputtering in several astrophysical settings and applications in research and technology. In addition, we emphasize some unsolved problems, propose experiments and provide guides to representative literature reviews and significant recent publications.

References

83