Applied Optics · 1986 · 39 citations · 5 references
Natural SciencesBioengineeringInstrumentationMetrologySurface ScienceConfocal MicroscopyInterferometryOptical MetrologyScanning Probe MicroscopySurface MetrologySurface MicroscopyConfocal MetrologyInterferometric MeasurementInterferometric MicroscopyNoncontact Surface MeasurementOptical InterferometryOptical ProfilometryOptical Surface ProfilometrySurface Profiling
A noncontacting surface profiling technique with 1-nm height resolution is described. A feedback arrangement keeps in quadrature the two arms of a confocal interference microscope by modulating the reference beam using an electrooptic phase modulator.
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Optical heterodyne profilometry
Gary E. Sommargren · Applied Optics · 1981 · 246 citations
Natural Sciences, Physics, Optics +16
Optical Heterodyne Profilometer
Chao Huang · Optical Engineering · 1984 · 55 citations