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Composition, morphology and mechanical properties of plasma-assisted chemically vapor-deposited TiN films on M2 tool steel

Materials ScienceMaterials EngineeringEngineeringPowder MetallurgyMechanical PropertiesM2 Tool SteelMechanical EngineeringVapor-deposited Tin FilmsThin FilmsChemical Vapor DepositionSurface ProcessingPlasma ProcessingMicrostructureMetal Processing