Composition, morphology and mechanical properties of plasma-assisted chemically vapor-deposited TiN films on M2 tool steel

Michael R. Hilton, L. R. Narasimhan, S. Nakamura, Miquel Salmerón, Gábor A. Somorjai

Thin Solid Films · 1986 · 82 citations · 24 references

Concepts

References

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