Spin coating as a method for polymer molecular weight determination

Characteristics of resist films produced by spinning

Dietrich Meyerhofer · Journal of Applied Physics · 1978 · 655 citations

Natural Sciences, Materials Engineering, Materials Science +13

Introduction to physical polymer science

C. P. Buckley · The Chemical Engineering Journal and the Biochemical Engineering Journal · 1993 · 196 citations

Natural Sciences, Materials Science, Physics +12

Investigation of the solvent‐evaporation effect on spin coating of thin films

B. T. Chen · Polymer Engineering and Science · 1983 · 108 citations

Natural Sciences, Chemistry, Materials Science +16

An Investigation of the Thickness Variation of Spun‐on Thin Films Commonly Associated with the Semiconductor Industry

W. J. Daughton, F. L. Givens · Journal of The Electrochemical Society · 1982 · 105 citations

Natural Sciences, Materials Engineering, Materials Science +14

The effects of gas phase convection on mass transfer in spin coating

David E. Bornside, Robert A. Brown, Paul Ackmann et al. · Journal of Applied Physics · 1993 · 57 citations

Natural Sciences, Materials Engineering, Materials Science +17