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Selective etching of dislocations in GaN grown by low-pressure solution growth

Materials EngineeringMaterials ScienceWide-bandgap SemiconductorSelective EtchingEngineeringSurface ScienceApplied PhysicsAluminum Gallium NitrideGan Power DeviceLow-pressure Solution GrowthCategoryiii-v SemiconductorPlasma Etching