Thermodynamic study, compositional and electrical characterization of LPCVD SiO2 films grown from TEOS/N2O mixtures - Concepedia

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Thermodynamic study, compositional and electrical characterization of LPCVD SiO2 films grown from TEOS/N2O mixtures

10

Citations

3

References

1998

Year

V. Em. Vamvakas, Dimitris Davazoglou, Constantin Vahlas

Microelectronics Reliability

References

	Year	Citations

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