Publication | Closed Access
Field emission current cleaning and annealing of microfabricated cold cathodes
35
Citations
14
References
2001
Year
Materials ScienceThermal CleaningChemical EngineeringElectrical EngineeringMicrofabricated Cold CathodesEngineeringMicrofabricationGlow DischargeApplied PhysicsExtracted Field EmissionGas Discharge PlasmaMicroelectronicsCathode Tip Surface
Thermal cleaning and annealing by the extracted field emission current has been used to achieve and maintain stable emission characteristics with microfabricated cold field emission cathodes. Our studies show that the cathode tip surface can be smoothed, recrystallized, and at least partially cleaned of surface adsorbates. The result is a significant decrease in emission current noise and recovery of the initial current–voltage characteristics of the cathode following surface contamination.
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