Deposition of Polyethylene Thin Films Using Synchrotron Radiation Ablation

Abstract

Crystalline polyethylene thin films were deposited on Si substrates using the synchrotron radiation(SR) ablation method. The deposited films were characterized by X-ray diffraction and Fourier-transform infrared spectroscopy. In order to understand the mechanism for the decomposition that occurs due to SR ablation, analysis of gases resulting from the decomposition was performed using the quadrupole mass spectrometric method. The mechanism involved in the carbonization was clarified.