Characterization and Crystalline Structures of Tungsten Thin Films

Abstract

Tungsten thin films evaporated by an e-gun present different reactive properties. From XPS and GXR (grazing X-ray reflection) methods it is shown that the β structure cannot be related to a new phase of the metal. A special feature has been done for carbon–tungsten multilayers; this in order to determine the quality of the C/W interfaces which states the expected performances of super-mirrors. After heating, up to 1200 K, different compounds (W18o49 for instance) are formed in the film.