Effects of RF power on the structural, optical and electrical properties of Al-doped zinc oxide films

Shou‐Yi Kuo, Kou‐Chen Liu, Fang‐I Lai, Jui‐Fu Yang, Wei‐Chun Chen, Ming‐Yang Hsieh, Hsin-I Lin, Woei-Tyng Lin

Microelectronics Reliability · 2010 · 71 citations · 30 references

Concepts

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