Journal of Applied Physics · 1998 · 149 citations · 6 references
Natural SciencesPhysicsPlasma PhysicsSpectroscopic AnalysisSpectroscopyEmission SpectroscopyLaser SpectroscopyLaser-plasma InteractionsPlasma DiagnosticsUltraviolet SpectroscopyLaser AblationLocal Thermodynamic Equilibrium ApproximationLocal Thermodynamic Equilibrium ModelingSpectral Line AnalysisSpectral Line ModelingSpectral Line Shape AnalysisThermodynamic EquilibriumUltraviolet Spectral Diagnostics
We have performed time- and space- resolved plasma diagnostics during ultraviolet excimer laser ablation of a Ti target in a low pressure N2 atmosphere. Spectral lines emitted from metal vapor ions in the early plasma phase (t⩽200 ns) have been analyzed and compared to line profiles computed for a plasma in a local thermodynamic equilibrium.
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Gas flow dynamics in laser ablation deposition
J.C.S. Kools, T. Baller, S.T. de Zwart et al. · Journal of Applied Physics · 1992 · 180 citations
High-quality optical and epitaxial Ge films formed by laser evaporation
H. Sankur, W. J. Gunning, J.F. DeNatale et al. · Journal of Applied Physics · 1989 · 69 citations