Japanese Journal of Applied Physics · 2013 · 12 citations · 13 references
EngineeringLaser ScienceElectron-beam LithographyThermal LithographyLaser ApplicationsLaser PhysicsLaser MaterialLaser-induced Heat DistributionMicro-optical ComponentBeam LithographyOptical PropertiesNanolithography MethodMaterials ScienceUnique MorphologiesFabrication TechniqueLaser Beam PropagationZinc SulfideAdvanced Laser ProcessingMicrofabricationApplied PhysicsLaser-surface InteractionsOptoelectronicsLaser Damage
Unique morphologies including a hemispherical dot and an inverse trapezoid line were fabricated from a mixture of zinc sulfide (ZnS) and silicon dioxide (SiO 2 ) using thermal lithography. Depending on the laser power, three types of morphologies were formed for each of the dot and line patterns. The patterns were affected by the concentric heat transfer from the underlying light-absorption layer, and the transverse heat transfer caused by the spatial restriction. These unique morphologies are difficult to fabricate using photolithography, and they are therefore promising for new functional applications involving microscale structures.
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Completely Erasable Phase Change Optical Disk
Hiroko Iwasaki, Yukio Ide, Makoto Harigaya et al. · Japanese Journal of Applied Physics · 1992 · 106 citations